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High Resolution Multi Technique X-Ray Spectrometer (Axis Ultra DLD XPS, Kratos)

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Instrument Name & Model: High Resolution Multi Technique X-Ray Spectrometer (Axis Ultra DLD XPS, Kratos)

Special Features
• Multi technique surface analysis including XPS, SAM, ISS, and UPS
• Qualitative and quantitative analysis and composition
• Chemical state analysis and quantification
• Minimum spot size analysis of 15 mm.
• Real time parallel quantitative chemical imaging at resolution of 3 micron.
• Angle resolved spectroscopy for film thickness measurement.

Applications
• Atomic layer surface analysis of advance material.
• Multi layer ultra thin thickness measurement.
• Study and research of catalyst and material.
• Failure analysis of electronic material and components.
• Homogenous study of chemical coating and bonding.
• Forensic study of surface contaminant and coating.
• Material research and Development

Location: X-Ray Room (G008)

Contact:

X-RAY LAB

Hariy Bt. Pauzi
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Tel : 04-599 6504 Fax : 04-599 6915
Science and Engineering Research Centre (SERC)
Engineering Campus
Universiti Sains Malaysia
14300 Nibong Tebal, Penang, Malaysia